Radiation imagery chemistry: process – composition – or product th – Stripping process or element – Forming nonplanar image
Patent
1972-11-22
1980-03-18
Klein, David
Radiation imagery chemistry: process, composition, or product th
Stripping process or element
Forming nonplanar image
430260, G03c 500
Patent
active
041937970
ABSTRACT:
A process for forming a photoresist which comprises:
REFERENCES:
patent: 3046120 (1962-07-01), Schmidt et al.
patent: 3126281 (1964-03-01), Sus et al.
patent: 3395016 (1968-07-01), Loeb
patent: 3493371 (1970-02-01), Poot
patent: 3526504 (1970-09-01), Celeste
patent: 3592646 (1971-07-01), Holstead et al.
Cohen Abraham B.
Heiart Robert B.
E. I. DuPont de Nemours and Company
Klein David
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