Glass manufacturing – Processes – With chemically reactive treatment of glass preform
Patent
1983-07-05
1987-03-24
Bashore, S. Leon
Glass manufacturing
Processes
With chemically reactive treatment of glass preform
65 602, 65 608, 350 9612, C03C 1700, G02B 610
Patent
active
046522905
ABSTRACT:
An optical channel waveguide is manufactured by forming an optical isolation pedestal or ridge on a substrate and coating the substrate and pedestal with an optical channel layer. The optical channel waveguide is that portion of the optical channel layer which overlies the pedestal. Cladding layers may be added overlying the optical channel film or the cladding function may be performed by air. The disclosed process requires no high temperature diffusion steps and is thus suitable for manufacturing optical channel waveguides integrated on a semiconductor substrate with semiconductor devices. In addition, the entire process for manufacturing the optical channel waveguide may be carried out during a single pumpdown of a vacuum system.
REFERENCES:
patent: 3817730 (1974-06-01), Uchida
patent: 3885855 (1975-05-01), Gross
patent: 4343890 (1982-08-01), Phillips et al.
patent: 4376160 (1983-03-01), Evanchuk
Hack's Chem Dict. p. 610, 4th edition 1972.
Intro. to Ceramics, by Kingery et al., 2nd edition, 1976, pp. 886-887.
Cho Frederick Y.
Hickernell Fred S.
Richard Fred V.
Bashore S. Leon
Boyer Michael K.
Motorola Inc.
Parsons Eugene A.
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