Electric heating – Metal heating – By arc
Reexamination Certificate
2005-05-03
2009-06-30
Heinrich, Samuel M (Department: 3742)
Electric heating
Metal heating
By arc
C219S121850, C438S662000
Reexamination Certificate
active
07554055
ABSTRACT:
An ohmic contact for a silicon slider body is disclosed. A scanned laser beam locally heats a metal film on the slider body to interdiffuse the metal and silicon while minimizing the total thermal load on the slider body. This localized heating avoids thermal damage to the sensitive magnetic head region on the slider. The native oxide layer on the slider is removed by a sputter etch, followed by deposition of a diffusion layer. A capping layer is then deposited to reduce oxidation during subsequent processing. The metal layer is then locally annealed by scanning the laser beam over the target area. Contact resistance of less than 100 ohms is achieved while minimizing the thermal load on the slider body.
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Reiley Timothy Clark
Strand Timothy Carl
Bracewell & Giuliani LLP
Heinrich Samuel M
Hitachi Global Storage Technologies - Netherlands B.V.
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