Method for making nanostructures

Details Method for making nanostructures Method for making nanostructures

2011-08-09

2011-08-09

Patel, Nimeshkumar D (Department: 2879)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C427S249100, C427S249200, C427S249700, C427S249800, C427S301000

Reexamination Certificate

active

07993703

ABSTRACT:
A process for making nanostructures on a support, including: supplying a support including a surface layer on one of its faces, covering the surface layer by a catalyst layer structured according to a pattern exposing areas of the surface layer covered by the catalyst and areas of the surface layer not covered by the catalyst, etching the thickness of the surface layer in the areas not covered by the catalyst layer, and selectively growing nanostructures on the areas of the surface layer covered by the catalyst. The process can also be used to make cathode structures with electrically independent nanostructures.

REFERENCES:
patent: 6062931 (2000-05-01), Chuang et al.
patent: 6541906 (2003-04-01), Lee et al.
patent: 6803708 (2004-10-01), Simon et al.
patent: 6946787 (2005-09-01), Oh
patent: 7094692 (2006-08-01), Horibe et al.
patent: 7175494 (2007-02-01), Kang et al.
patent: 7446469 (2008-11-01), Lee
patent: 7521851 (2009-04-01), Tolt
patent: 2002/0060514 (2002-05-01), Nakamoto
patent: 2002/0172820 (2002-11-01), Majumdar et al.
patent: 2002/0175408 (2002-11-01), Majumdar et al.
patent: 2002/0175617 (2002-11-01), Lee et al.
patent: 2003/0122467 (2003-07-01), Cho et al.
patent: 2003/0230968 (2003-12-01), Lee et al.
patent: 2004/0036400 (2004-02-01), Simon et al.
patent: 2004/0037972 (2004-02-01), Simon et al.
patent: 2004/0161929 (2004-08-01), Son et al.
patent: 2004/0183422 (2004-09-01), Kuroda et al.
patent: 2005/0161662 (2005-07-01), Majumdar et al.
patent: 2005/0236963 (2005-10-01), Kang et al.
patent: 2006/0238096 (2006-10-01), Han et al.
patent: 2007/0222357 (2007-09-01), Dijon et al.
patent: 1 336 980 (2003-08-01), None
patent: 1 582 501 (2005-10-01), None
patent: 2 593 953 (1987-08-01), None
patent: 2 798 507 (2001-03-01), None
patent: 2 798 508 (2001-03-01), None
patent: 2004281166 (2004-10-01), None
patent: 2004362960 (2004-12-01), None
patent: 2004 063091 (2004-07-01), None
U.S. Appl. No. 11/632,944, filed Jan. 19, 2007, Dijon, et al.
A. P. Graham, et al., “Towards the Integration of Carbon Nanotubes in Microelectronics”, Diamond and Related Materials, XP 004507963, vol. 13, No. 4-8, pp. 1296-1300, 2004.
David J. Srolovitz, et al., “The Thermodynamics and Kinetics of Film Agglomeration”, Journal of Metals, Vo. 47, No. 3, pp. 31-36, 76-77, 1995.
Jong Hyung Choi, et al., “Control of Carbon Nanotubes Density Through NI Nanoparticle Formation Using Thermal and NH3Plasma Treatment”, Diamond and Related Materials, vol. 12, 794-798, 2003.
Jong Hyung Choi, et al., “Density Control of Carbon Nanotubes Using NH3Plasma Treatment of NI Catalyst Layer”, Thin Solid Film, vol. 435, pp. 318-323, 2003.
Y. Tu, et al., “Growth of Aligned Carbon Nanotubes With Controlled Site Density”, Applied Physics Letters, vol. 80, No. 21, pp. 18-20, 2002.
G. S. Duesberg, et al., “Ways Towards the Scaleable Integration of Carbon Nanotubes Into Silicon Based Technology”, Diamond and Related Materials, vol. 13, pp. 354-361.

Affiliated with

Also associated with

Rating

Method for making nanostructures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for making nanostructures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for making nanostructures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2719890