Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Having diverse electrical device
Patent
1996-09-09
1998-06-23
Niebling, John
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Having diverse electrical device
438 29, 438 34, H01L 2100
Patent
active
057704724
ABSTRACT:
An optical signal processor is implemented as a monolithically integrated semiconductor structure having optical waveguide devices forming beam splitters, optical amplifiers and optical phase shifters. The monolithic structure photonically controls a phased-array microwave antenna. Phase-locked master and slave lasers generate orthogonal light beams having a difference frequency that corresponds to the microwave carrier frequency of the phased-array antenna. The lasers feed the signal processor, which performs beam splitting, optical amplifying and phase shifting functions. A polarizer and an array of diode detectors convert optical output signals from the signal processor into microwave signals that feed the phased-array antenna. The optical waveguides of the signal processor are fabricated in a single selective epitaxial growth step on a semiconductor substrate.
REFERENCES:
Kato et al. "DFB-LD/Modulator Integrated Light Source by Bandgap Energy Crolled Selective MOVPE." Electron. Letters, vol. 28, pp. 153-154, (1992).
Demeester et al. "Non-planar MOVPE growth using a novel shadow-masking technique." Journal of Crystal Growth, 107, pp. 161-165, (1991).
Zhou et al. "Heavy-and light-hole band crossing in a variable-strain quantum-well heterostructure." Physical Review B, vol. 51, No. 8, pp. 5461-5464, 15 Feb. 1995.
Galeuchet et al. "Selective area MOVPE of GaInAs/InP Heterostructure on masked and nonplanar (100) and (111) substrates." Journal of Crystal Growth, vol. 107, pp. 147-150, (1991).
Aoki et al. "Novel MQW electroabsorption modulator/DFB-laser integrated device grown by selective area MOCVD." proceedings OFC '92/Friday Morning, p. 276, (1992).
Dutta Mitra
Pamulapati Jagadeesh
Shen Paul H.
Zhou Weimin
Niebling John
O'Meara John M.
Pham Long
The United States of America as represented by the Secretary of
Zelenka Michael
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