Etching a substrate: processes – Forming or treating optical article – Lens
Patent
1996-02-15
1998-02-17
Nguyen, Nam
Etching a substrate: processes
Forming or treating optical article
Lens
216 58, 216 83, 430321, B44C 122, G02B 100
Patent
active
057188300
ABSTRACT:
A method for making a microlens comprising the steps of uniformly distributing a volume of Poly(methylmethacrylate) (PMMA) across a major surface of a substrate, hardening the PMMA layer on the substrate surface, patterning the PMMA layer and forming patterned PMMA and reflowing the patterned PMMA to form at least one microlens on the substrate.
REFERENCES:
patent: 5135590 (1992-08-01), Basavanhally et al.
patent: 5286338 (1994-02-01), Feldblum et al.
patent: 5310623 (1994-05-01), Gal
patent: 5316640 (1994-05-01), Wakabayashi et al.
Hlinka Charles George
Markham Janet Louise
Mersereau Keith Owen
Nijander Casimir Roman
Wong Yiu-Huen
Adjodha Michael E.
Lucent Technologies - Inc.
Nguyen Nam
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