Method for making micro lenses

Details Method for making micro lenses Method for making micro lenses

2005-08-09

2005-08-09

Edwards, Laura (Department: 1734)

Plastic and nonmetallic article shaping or treating: processes

Optical article shaping or treating

Composite or multiple layer

C427S162000

Reexamination Certificate

active

06926850

ABSTRACT:
A micro lens, or an array of micro lenses, can be formed without requiring the etching of a mesa into the substrate by deposited directly on the substrate, without any mesa each of the individual portions of the substance to be melted. The whole substrate and the portions are then conformally coated with a very thin layer of a substance, typically an adhesion promoter, e.g., hexamethyldisilazane (HMDS). The entire coated wafer is then subject to conditions which cause each of the individual substance portions to flow into a lens shape. A lens shape is achieved without requiring a mesa because the layer of adhesion promoter prevents the flowing substance from spilling in an undesired manner over the surface of the substrate.

REFERENCES:
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patent: 5479049 (1995-12-01), Aoki et al.
patent: 5498444 (1996-03-01), Hayes
patent: 5536455 (1996-07-01), Aoyama et al.
patent: 2002/0094419 (2002-07-01), Lin et al.
Lars Erdmann et al., “Technique for monolithic fabrication of silicon microlenses with selectable rim angles”,Opt. Eng., vol. 36, No. 4, Apr. 1997, pp. 1094-1098.

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