Method for making micro electron beam source

Details Method for making micro electron beam source Method for making micro electron beam source

1995-03-10

1998-03-24

Niebling, John

Fishing, trapping, and vermin destroying

1566441, 455 47, 455 49, 455 50, 455 51, 313309, 313336, 313351, H01L 21465

Patent

active

057312281

ABSTRACT:
A method for fabricating a micro-field emission gun including the steps of providing an insulator slab, formed with a penetrating hole acting as a passage of an electron beam, upon a gate electrode of the micro-field emission gun, such that the penetrating hole is aligned with an emitter of the micro-field gun, bonding an insulator slab upon the gate electrode by means of an anodic bonding process, and providing an acceleration electrode on the insulator slab such that the acceleration electrode covers a surface of said insulator slab facing away from said gate electrode, except for a passage of the electron beam.

REFERENCES:
patent: 4874981 (1989-10-01), Spindt
patent: 4983878 (1991-01-01), Lee et al.
patent: 5012153 (1991-04-01), Atkinson et al.
patent: 5136764 (1992-08-01), Vasquez
patent: 5150019 (1992-09-01), Thomas et al.
patent: 5164632 (1992-11-01), Yoshida et al.
patent: 5176557 (1993-01-01), Okunuki et al.
patent: 5218273 (1993-06-01), Kane et al.
patent: 5229331 (1993-07-01), Doan et al.
patent: 5315206 (1994-05-01), Yoshida
patent: 5378182 (1995-01-01), Liu
patent: 5444328 (1995-08-01), Van Zutphen
patent: 5451175 (1995-09-01), Smith et al.
patent: 5461009 (1995-10-01), Huang et al.
patent: 5480843 (1996-01-01), Park et al.
patent: 5482486 (1996-01-01), Vandaine et al.
patent: 5496200 (1996-03-01), Yang et al.
patent: 5509839 (1996-04-01), Liu
Spindt et al. "Field-Emitter Arrays . . . Microelectronics", IEEE Transctions on Elec. Dev., vol. 38, No. 19, Oct. 1991.

Affiliated with

Also associated with

Rating

Method for making micro electron beam source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for making micro electron beam source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for making micro electron beam source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2288415