Method for making metal oxide sputtering targets (barrier powder

Details Method for making metal oxide sputtering targets (barrier powder Method for making metal oxide sputtering targets (barrier powder

1994-08-25

1997-08-12

Simmons, David A.

Plastic and nonmetallic article shaping or treating: processes

Forming articles by uniting randomly associated particles

Stratified or layered articles

264109, 264332, 264338, 264DIG36, B22F 315, C04B 35453

Patent

active

056562160

ABSTRACT:
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by enveloping the metal oxide powder in at least one layer of a barrier material while the powder is hot-pressed using a graphite die assembly.

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Brochure: "NX-100.TM. Series of Titanium Carbide Coated Graphite", Lanxide Corp. (undated).

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