Method for making magnetic write head

Details Method for making magnetic write head Method for making magnetic write head

2008-06-03

2008-06-03

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603070, C029S603130, C029S603150, C029S603180

Reexamination Certificate

active

07380330

ABSTRACT:
After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.

REFERENCES:
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patent: 6074566 (2000-06-01), Hsiao et al.
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patent: 2002/0191350 (2002-12-01), Santini
patent: 2003/0169534 (2003-09-01), Santini
patent: 2003/0223150 (2003-12-01), Lee
patent: 2004/0070872 (2004-04-01), Hsu et al.

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