Method for making LSCO stack electrode

Details Method for making LSCO stack electrode Method for making LSCO stack electrode

1995-03-15

1997-03-25

Nguyen, Tuan H.

Fishing, trapping, and vermin destroying

437190, 437 47, 437 60, 437919, 148DIG14, 148DIG100, H01L 2144

Patent

active

056144385

ABSTRACT:
A method for making an improved LSCO stack in the generation of platinum features on the surface of a substrate. The method provides an inexpensive means for depositing and etching LSCO material in the construction of small platinum features. The method comprises sputtering of the LSCO material and utilizing a photoresist mask to pattern the LSCO in accordance with the platinum features. The problems and expense associated with high-temperature deposition of LSCO on platinum and the etching thereof are overcome by sputtering the LSCO at room temperature.

REFERENCES:
patent: 5242534 (1993-09-01), Bullington et al.
patent: 5372859 (1994-12-01), Thakoor
patent: 5440173 (1995-08-01), Evans, Jr. et al.
patent: 5479317 (1995-12-01), Ramesh

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