Semiconductor device manufacturing: process – Having biomaterial component or integrated with living organism
Reexamination Certificate
2006-10-25
2008-10-21
Huynh, Andy (Department: 2818)
Semiconductor device manufacturing: process
Having biomaterial component or integrated with living organism
C438S105000, C438S122000, C438S618000, C438S780000, C257S040000, C257SE51040, C977S742000, C977S842000
Reexamination Certificate
active
07439081
ABSTRACT:
A conductive layer in an integrated circuit is formed as a sandwich having multiple sublayers, including at least one sublayer of oriented carbon nanotubes. The conductive layer sandwich preferably contains two sublayers of carbon nanotubes, in which the carbon nanotube orientation in one sublayer is substantially perpendicular to that of the other layer. The conductive layer sandwich preferably contains one or more additional sublayers of a conductive material, such as a metal. In one embodiment, oriented carbon nanotubes are created by forming a series of parallel surface ridges, covering the top and one side of the ridges with a catalyst inhibitor, and growing carbon nanotubes horizontally from the uncovered vertical sides of the ridges. In another embodiment, oriented carbon nanotubes are grown on the surface of a conductive material in the presence of a directional flow of reactant gases and a catalyst.
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Furukawa Toshiharu
Hakey Mark Charles
Holmes Steven John
Horak David Vaclav
Koburger III Charles William
Huynh Andy
International Business Machines - Corporation
Truelson Roy W.
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