Method for making high thermal conducting diamond

Details Method for making high thermal conducting diamond Method for making high thermal conducting diamond

1994-10-03

1995-08-29

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes joining independent crystals

117 89, 423416, C30B 2502

Patent

active

054451060

ABSTRACT:
A method is disclosed for producing continuous CVD diamond films with at least two controlled diamond thermal conductivity layers having improved thermal conductivity in the direction parallel to the diamond film plane to increasing the lateral heat spreading ability of the diamond film. Also, disclosed is a method to decrease the time to deposit high thermal conducting diamond by chemical vapor deposition.

REFERENCES:
patent: 5114696 (1992-05-01), Purdes
patent: 5273731 (1993-12-01), Anthony et al.
patent: 5310596 (1994-05-01), Bigelow et al.
patent: 5346729 (1994-09-01), Pitts et al.
"Isotherms in Diamond Heat Sinks, Non-Linear Heat Transfer in an Excellent Heat Conductor", J. Doting, et al., IEEE, 1988, pp. 113-117.
"Temperature Distribution in GaAs Lasers with Diamond Film Heatsink", GK Reeves, et al., Electronics Letters, Dec. 3, 1992, vol. 28, No. 25, pp. 2317-2318.
"Thermal and Optical Applications of Thin Film Diamond", M. Seal, Phil. Trans. R. Soc. London, 1993, pp. 119-128.

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