Method for making extreme ultraviolet lithography structures

Details Method for making extreme ultraviolet lithography structures Method for making extreme ultraviolet lithography structures

2006-01-24

2006-01-24

Vincent, Sean (Department: 1731)

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

C065S144000

Reexamination Certificate

active

06988377

ABSTRACT:
A method for forming EUV LITHOGRAPHY GLASS STRUCTURES WITH VOIDS is disclosed which includes forming a slurry mixture including silica soot particles, and inserting the slurry mixture into a casting mold. The method provides low weight mass reduced rigid glass structures with beneficial thermal stability. The casting mold includes therein a casting form. The casting form is adapted to provide selected geometry void spaces within the glass lithography structure. The slurry mixture is dried to form a green ware object. The casting form is removed from the green ware and the green ware object is consolidated into a lithography glass structure with voids.

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