Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1983-09-29
1984-11-06
Hearn, Brian E.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148187, 29591, H01L 21225, H01L 2128
Patent
active
044810466
ABSTRACT:
A method for diffusing a conductivity determining impurity in a semiconductor substrate and making electrical contact thereto by depositing a conductive layer made of a rare earth hexaboride material containing a predetermined amount of silicon in it over a surface portion of the substrate and heating the substrate for a predetermined period of time at a predetermined temperature which is sufficient to cause boron from the hexaboride material to diffuse into the adjoining portion of the substrate to modify its conductor characteristics. At the same time a good electrical ohmic contact is established between the conductive layer and the adjoining substrate portion while the conductive layer retains its conductivity even after the outdiffusion of some of its boron into the substrate during the heat treatment. A silicon dioxide layer is also formed on the exposed surface of the silicon containing hexaboride material through the oxidation of the silicon disposed close to the exposed surfaces of the hexaboride material.
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Bouldin Dennis P.
Hallock Dale P.
Roberts Stanley
Ryan James G.
Hearn Brian E.
International Business Machines - Corporation
Schiavelli Alan E.
Tacticos George
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