Method for making contact openings in color image sensor passiva

Details Method for making contact openings in color image sensor passiva Method for making contact openings in color image sensor passiva

1991-06-17

1992-09-01

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437228, 437229, 430 7, 1566591, H01L 2156, H01L 2714, H01L 310216

Patent

active

051438550

ABSTRACT:
This invention relates to a method for fabricating a color solid-state image sensor which comprises, the steps of: forming an inorganic passivation layer over an array of photosensing elements and their associate bonding patterns; providing a color filter array over the passivation layer; forming a photoresist layer over the color filter array and other exposed areas; forming a pattern in the photoresist such that portions over the bonding pad areas are opened; and removing selective regions of the passivation layer to expose the bonding pads.

REFERENCES:
patent: 4783691 (1988-11-01), Harada
patent: 4786819 (1988-11-01), Tei

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