Method for making condenser microphones

Details Method for making condenser microphones Method for making condenser microphones

2006-04-24

2008-03-18

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025420, C029S609100, C381S174000, C381S191000, C367S178000, C367S180000, C438S365000, C438S378000, C438S486000

Reexamination Certificate

active

07343661

ABSTRACT:
A method for making condenser microphones includes: forming a fixed electrode layer structure of a plurality of fixed electrode units; forming a sacrificial layer of a plurality of sacrificial units on one side of the fixed electrode layer structure; forming a diaphragm layer structure of a plurality of diaphragm units on the sacrificial layer; forming a patterned mask layer on an opposite side of the fixed electrode layer structure opposite to the sacrificial layer; forming a plurality of etching channels, each of which extends through the patterned mask layer and the fixed electrode layer structure; removing a portion of the sacrificial layer of each of the sacrificial units so as to form a spacer between a respective one of the fixed electrode units and a respective one of the diaphragm units; and removing the patterned mask layer.

REFERENCES:
patent: 6677214 (2004-01-01), Shindo et al.
patent: 6708387 (2004-03-01), Tanabe et al.
patent: 6928178 (2005-08-01), Chang

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