Method for making ceramic micro-electromechanical parts and tool

Details Method for making ceramic micro-electromechanical parts and tool Method for making ceramic micro-electromechanical parts and tool

1997-06-02

1999-03-30

Fiorilla, Christopher A.

Plastic and nonmetallic article shaping or treating: processes

Outside of mold sintering or vitrifying of shaped inorganic...

Of electrical article or electrical component

264619, E04B 3700

Patent

active

058884459

ABSTRACT:
A method for making electromechanical parts and tools having at least one micro-diameter electrically conductive thread incorporated therein is accomplished by molding the elements which form the base for the electromechanical part or tool from a ceramic material and, during the molding step, there are formed one or more bores through each of the base elements. The base elements may be formed individually or at a planar array for later separation into individual elements. The base elements are then supported on a micro-porous substrate within a vacuum chamber and one side of the base element is flooded with a molten electrically conductive material. By drawing a vacuum within the vacuum chamber beneath the micro-porous substrate, the molten electrically conductive material is caused to flow into and through at least one bore in each base element. The molten electrically conductive material is then cooled. In such manner, through the molding of the ceramic material into the desired shape with desired bores forming conduits for the molten electromechanical material, a variety of micro-electromechanical parts and tools can be fabricated.

REFERENCES:
patent: 2820720 (1958-01-01), Iversen
patent: 3536798 (1970-10-01), Nyman
patent: 4026746 (1977-05-01), Straw
patent: 5475264 (1995-12-01), Sudo et al.
patent: 5614043 (1997-03-01), Ritland et al.
Edward P. Furlani et al, "Method and Apparatus for the Formation and Polarization of Micromagnets", USSN 08/795,332, filed Feb. 4, 1997.
Edward P. Fulani et al., "Method for Making Ceramic Tools for the Production of Micromagnets", USSN 08/795,690, filed Feb. 4, 1997.
Dilip K. Chatterjee et al, "A Method for the Fabrication of Micro-electromechanical Ceramic Parts with an Electrical Trace", USSN 08/751,529, filed Nov. 14, 1996.

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