Method for making carbon nanotube-based device

Details Method for making carbon nanotube-based device Method for making carbon nanotube-based device

2006-05-03

2010-06-29

Turocy, David (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C427S248100, C977S840000, C977S843000, C977S890000, C423S44500R, C423S447100, C423S447300

Reexamination Certificate

active

07744958

ABSTRACT:
A method for making a carbon nanotube-based device is provided. A substrate with a shadow mask layer formed thereon is provided, to define an unmasked surface area on the substrate. The substrate is rotated around an axis. A catalyst layer including at least one catalyst block is formed on the unmasked surface area of the substrate. A thickness of the at least one catalyst block is decreased gradually from a first end thereof to an opposite second end thereof, and somewhere the at least one catalyst block having a region with a thickness proximal or equal to an optimum thickness at which carbon nanotubes growing fastest. A carbon source gas is introduced. At least one carbon nanotube array extending from the catalyst layer using a chemical vapor deposition process is formed. The at least one carbon nanotube array is arc-shaped, and bend in a direction of deviating from the region.

REFERENCES:
patent: 4776868 (1988-10-01), Trotter et al.
patent: 5866204 (1999-02-01), Robbie et al.
patent: 6013544 (2000-01-01), Makita et al.
patent: 6232706 (2001-05-01), Dai et al.
patent: 6506695 (2003-01-01), Gardner et al.
patent: 7099963 (2006-08-01), Byers et al.
patent: 7147831 (2006-12-01), Liu et al.
patent: 7291319 (2007-11-01), Liu et al.
patent: 2003/0102099 (2003-06-01), Yadav et al.
patent: 2004/0109815 (2004-06-01), Liu et al.
patent: 2004/0136896 (2004-07-01), Liu et al.
patent: 2004/0191158 (2004-09-01), Liu et al.
patent: 2006/0035084 (2006-02-01), Liu et al.
patent: 62007851 (1987-01-01), None
patent: 2002071944 (2002-03-01), None
patent: 2005068510 (2005-03-01), None
Guillorn “Fabrication of gated cathode structures using an in situ grown vertically aligned carbon nanofiber as a field emission element” J. Vac. Sci. Technol. B 19(2) Mar./ Apr. 2001. p. 573-578.
Yuegang Zhang et al, Electric-field-directed growth of aligned single-walled carbon nanotubes, Appl. Phys. Lett., Nov. 5, 2001, 3155-3157, vol. 79, No. 19.
B. Q. Wei et al, Organized assembly of carbon nanotubes, Nature, Apr. 4, 2002, 495-496, vol. 416.
S. S. Fan et al, Self-oriented regular arrays of carbon nanotubes and their field emission properties, Science, Jan. 22, 1999, 512-514, vol. 283.
Z. F. Ren et al, Synthesis of large arrays of well-aligned carbon nanotubes on glass, Science, Nov. 6, 1998, 1105-1107, vol. 282.

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