Fishing – trapping – and vermin destroying
Patent
1991-07-26
1994-03-01
Quach, T. N.
Fishing, trapping, and vermin destroying
437 52, 437190, 437192, 437193, 437922, 148DIG1, 148DIG55, 257530, H01L 21283, H01L 21311
Patent
active
052907341
ABSTRACT:
An anti-fuse structure characterized by a substrate, an oxide layer formed over the substrate having an opening formed therein, an amorphous silicon material disposed within the opening and contacting the substrate, a conductive protective material, such as titanium tungsten, disposed over the amorphous silicon material, and oxide spacers lining the walls of a recess formed within the protective material. The protective material and the spacers provide tighter programming voltage distributions for the anti-fuse structure and help prevent anti-fuse failure.
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Cook, B., et al., "Amorphous Silicon Antifuse . . . ", 1986 Bipolar Circuits and Technology Meeting, 1986 IEEE, pp. 99-100.
Boardman William J.
Chan David P.
Chang Kuang-Yeh
Gabriel Calvin T.
Jain Vivek
Quach T. N.
VLSI Technology Inc.
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