Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1995-07-27
1996-11-19
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
428 14, 428421, 1566451, G03F 900
Patent
active
055761259
ABSTRACT:
A method for manufacturing an optical pellicle is disclosed. The method includes the dispensing a quantity of adhesive onto a pellicle membrane in a pattern corresponding to the shape of a pellicle frame, positioning the pellicle membrane and the pellicle frame so that the adhesive and the frame are aligned, and mounting the pellicle membrane and the pellicle frame by bringing the adhesive into contact with the pellicle frame. In one embodiment of the present invention, the pellicle membrane is tensed prior to the application of adhesive onto the membrane. Additionally, other embodiments of the present invention include the applying the adhesive with a dispenser having either a rigid or a flexible distal portion, or a dispenser tip having a distal portion comprising a flexible both a rigid portion and a flexible portion, with the flexible portion at least partially disposed within and partially protruding from the rigid portion.
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Micro Lithography, Inc.
Rosasco S.
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