Metal working – Method of mechanical manufacture – Electrical device making
Patent
1995-07-10
1998-05-05
Vo, Peter
Metal working
Method of mechanical manufacture
Electrical device making
29841, 29847, 29851, 29852, 174259, 174260, 257700, 428901, 437209, H05K 332
Patent
active
057459843
ABSTRACT:
A multi-chip module is provided which utilizes benzocyclobutene as a laminate adhesive for bonding the upper dielectric films in a high density interconnect structure. The benzocyclobutene thermosetting polymer is spin coated on a polyimide film, and baked at low temperature to remove any solvent to leave a B-staged coating on the polyimide film. The composite film can be laminated to an underlying electrical structure using a vacuum laminator and heat. As the heat is applied, the BCB layer softens, flows and then cures to bond the polyimide film to the underlying electrical structure.
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Cole, Jr. Herbert Stanley
Sitnik-Nieters Theresa Ann
Krauss Geoffrey H.
Martin Marietta Corporation
Rees Brian J.
Vo Peter
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