Method for making airbridge from ion-implanted conductive polyme

Details Method for making airbridge from ion-implanted conductive polyme Method for making airbridge from ion-implanted conductive polyme

1994-11-21

1998-05-19

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437 18, 437 20, 437 37, 437 47, 437228, 437927, H01L 2484

Patent

active

057535230

ABSTRACT:
Organic films are applied from solvent solution to a substrate, then are ion implanted to have resistivity in the kilohm/square to gigaohm/square range. The films are then patterned by standard lithographic procedures, with surprisingly little loss of conductivity, in spite of contact with organic solvents or acidic or basic etchant solutions during the patterning process. Both structures which contact the substrate, and freestanding conductive polymer bridges, can be formed. The invention provides a method of producing electrical devices which does not require the use of single crystal semiconductor substrates or deposition of inorganic semiconductors. The resulting devices are highly resistant to damage from abrasion, solvents, acids, bases, and moisture.

REFERENCES:
patent: 4456522 (1984-06-01), Blackburn
patent: 4511445 (1985-04-01), Forrest et al.
patent: 4849071 (1989-07-01), Evans et al.
patent: 4994401 (1991-02-01), Ukai
patent: 5250388 (1993-10-01), Schoch, Jr. et al.
Masaaki, Iizuka et al. "Electrical and Optical Investigations of Carbon Clusters Formed in Organic Films By Ion Implantation", Nucl. Instrum. Methods Phys. Res., Sect. B (1993), B 80-81 (Pt2), 1072-5.
Masaaki, Iizuka, "Fabrication and Characterzation of Modified Layer in Ion Implanted Organic Film", Mr. Cyst. Liq. Cryst. Sci. Technec., Sect A (1994), 247, 173-8 Issn 1058-725 x.

Affiliated with

Also associated with

Rating

Method for making airbridge from ion-implanted conductive polyme does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for making airbridge from ion-implanted conductive polyme, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for making airbridge from ion-implanted conductive polyme will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1852349