Coating processes – Electrical product produced – Piezoelectric properties
Patent
1978-08-14
1980-07-22
Esposito, Michael F.
Coating processes
Electrical product produced
Piezoelectric properties
427124, 427250, 427314, 4273984, 29 2535, H04R 1700, B05D 512
Patent
active
042140188
ABSTRACT:
A method of forming an adherent pinhole free aluminum film on a pyroelectric and/or piezoelectric substrate comprising heating said substrate to from about 150.degree. C. to about 350.degree. C. at a pressure of from about 1.times.10.sup.-4 Torr to about 1.times.10.sup.-6 Torr for a sufficient time to desorb any gas molecules on the surface on said substrate, cooling said substrate with dry oxygen to about 125.degree. C. at a pressure of about 1.times.10.sup.-4 Torr and thereafter, terminating the flow of oxygen and further reducing the pressure to about 1.times.10.sup.-5 Torr or lower and evaporating an aluminum film on said substrate.
REFERENCES:
patent: 3123493 (1964-03-01), Brick
patent: 3341362 (1967-09-01), Hacskaylo
patent: 3468120 (1969-09-01), Nageo et al.
patent: 3498818 (1970-03-01), Bahm
patent: 3562604 (1971-02-01), Van Laer
patent: 3912830 (1975-10-01), Murayama
patent: 4049859 (1977-09-01), Yoshikawa
patent: 4056650 (1977-11-01), Dates
Hoffman et al., Pro. of . . . Frequency Control, "The Structure & Properties of Thin Metal Films", (1974), pp. 85-88.
Halon Bernard
Hoffman Dorothy M.
Esposito Michael F.
Morris Birgit E.
RCA Corporation
Zavell A. Stephen
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