Metal fusion bonding – Process – With condition responsive – program – or timing control
Patent
1997-02-27
2000-01-04
Ryan, Patrick
Metal fusion bonding
Process
With condition responsive, program, or timing control
2281805, 2281791, 228 45, 228 8, 228 12, 219385, H01L 2160
Patent
active
060100575
ABSTRACT:
In wire bonding a semiconductor chip to the lead frame or other substrate, increase of productivity is achieved by letting the capillary which guides the wire between the wiring points (4, 5) move faster along its trajectory in the two travel stages (s1, s2). The capillary's drives in the horizontal (x, y) and vertical (z) directions are programmed by presetting the speed (vH) of the horizontal component of the movement and then calculating the vertical speed (vV) as a dependent variable based on the given trajectory. In determining said horizontal speed (vH) to be preset, the maximum horizontal and/or vertical acceleration values (aH*, aV*) associated with the drive mechanism are taken into account. Further time can be saved by letting the horizontal travel begin during the first travel stage (s1) and, by simultaneous vertical and horizontal travel, producing a steady transition (point k') from the first stage (s1) to the second (s2).
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Egger Hans
Stossel Zeno
von Flue Daniel
Elve M. Alexandra
ESEC SA
Ryan Patrick
LandOfFree
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