Method for making a tantala/silica interference filter on the su

Details Method for making a tantala/silica interference filter on the su Method for making a tantala/silica interference filter on the su

1995-09-29

1997-08-19

Beck, Shrive

Coating processes

Electrical product produced

Hollow article

427166, 427167, 427255, 4272553, 4272557, 4273762, 427377, 427378, C23C 1640, C23C 1656

Patent

active

056586124

ABSTRACT:
A method for making a tantala/silica interference filter on the surface of a tungsten-halogen incandescent lamp having molybdenum leads includes depositing on the lamp surface by low pressure chemical vapor deposition the interference filter comprising alternating layers of tantala and silica. Thereafter, the filter is heat treated in an atmosphere of humidified inert gas containing less than 1% oxygen.

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patent: 4775203 (1988-10-01), Vakil et al.
patent: 4780334 (1988-10-01), Ackerman
patent: 4949005 (1990-08-01), Parham et al.
patent: 4983001 (1991-01-01), Hagiuda et al.
patent: 5196759 (1993-03-01), Parham et al.
patent: 5422534 (1995-06-01), Dynys et al.
patent: 5438012 (1995-08-01), Kamiyama

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