Method for making a superconducting gradiometer having a three-d

Metal working – Method of mechanical manufacture – Electrical device making

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324248, H01L 3924

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046945679

ABSTRACT:
For manufacturing a gradiometer having a three-dimensional structure for a device for measuring magnetic fields with field intensities down to below 10.sup.-10 T, the superconducting gradiometer coils are arranged on a support body and are coupled by means of superconducting connecting lines and a coupling coil to a superconducting quantum interference element (SQUID) which is located on a substrate body of its own. These gradiometers should be capable of being linked to the respectively assigned SQUID in a simple manner. For this purpose, the gradiometer coils and at least the associated connecting lines are applied onto a common three-dimensional support body in at least one coating operation which is either preceded by a lithographic process for the fixation of the position of the corresponding conductor runs, or is followed by an etching process.

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J. Appl. Physics, vol. 42, No. 11, Oct. 1971, pp. 4483-4487, by Zimmerman.
IEEE Trans on Magnetics, vol. MAG-13, No. 1, Jan. 1977, pp. 372-374, by Ketchen et al.
Phys. Stat. Sol (9) 49, K209 (1978), No. 2 (16 Oct.), by Richter et al.

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