Method for making a semiconductor device having an anhydrous fer

Coating processes – Electrical product produced – Piezoelectric properties

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4271262, 4271263, 4271264, 427226, 427240, 4273722, 427384, 437231, B05D 512

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052719553

ABSTRACT:
A method for making a semiconductor device having an anhydrous ferroelectric thin film obtained from an anhydrous sol-gel solution. An anhydrous PZT sol-gel solution is prepared from Lead (II) Acetate Anhydrous which is thermally reacted with Zirconium and Titanium precursors to form a gel condensate. The sol-gel condensate is prepared without hydrolyzing the sol-gel solution to obtain precursor complexes which do not contain water. The formulation of the sol-gel exclusively by thermal condensation and in the absence of hydrolysis yields an anhydrous amorphous sol-gel having a uniform condensate composition. The anhydrous PZT thin film formed by the anhydrous sol-gel exhibits improved durability and substantially complete low-temperature conversion to the perovskite crystalline phase.

REFERENCES:
patent: 5160762 (1992-11-01), Brand et al.
GAF Corporation, Chemical Division (1972), M-PYROL.RTM., N-Methyl-2-Pyrrolidone, Handbook, pp. 38 and 52, (mo. & yr. unavailable).

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