Method for making a master disk for nanoimprinting patterned...

Stock material or miscellaneous articles – Magnetic recording component or stock – Thin film media

Reexamination Certificate

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C428S800000, C360S015000

Reexamination Certificate

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07981533

ABSTRACT:
A method for making a master disk to be used for nanoimprinting patterned-media magnetic recording disks uses sidewall lithography. In one implementation, the master disk substrate has a first pattern of concentric rings formed on it by sidewall lithography, followed by a second pattern of generally radially-directed pairs of parallel lines, also formed by sidewall lithography, with the pairs of parallel lines intersecting the rings. An etching process is then performed, using the upper pattern as an etch mask, to remove unprotected portions of the underlying concentric rings. This leaves a pattern of pillars on the substrate, which then serve as an etch mask for an etching process that etches unprotected portions of the master disk substrate. The resulting master disk then has pillars of substrate material arranged in a pattern of concentric rings and generally radially-directed pairs of parallel lines.

REFERENCES:
patent: 5930065 (1999-07-01), Albrecht et al.
patent: 6042998 (2000-03-01), Brueck et al.
patent: 6303205 (2001-10-01), Tanaka et al.
patent: 6667237 (2003-12-01), Metzler
patent: 6754016 (2004-06-01), Messner et al.
patent: 7080596 (2006-07-01), Lee et al.
patent: 2002/0168548 (2002-11-01), Sakurai et al.
patent: 2005/0094549 (2005-05-01), Hieda et al.
patent: 2006/0276043 (2006-12-01), Johnson et al.
patent: 2007/0092650 (2007-04-01), Albrecht et al.
patent: 2008/0002296 (2008-01-01), Umeda et al.
patent: 2000113533 (2000-04-01), None
Bandic et al., “Patterned magnetic media: impact of nanoscale patterning on hard disk drives”, Solid State Technology S7+ Suppl. S, Sep. 2006.
Terris et al., “Topical Review: Nanofabricated and self-assembled magnetic structures as data storage media”, J. Phys. D: Appl. Phys. 38 (2005) R199-R222.
Moritz et al., “Patterned Media Made From Pre-Etched Wafers: A Promising Route Toward Ultrahigh-Density Magnetic Recording”, IEEE Transactions on Magnetics, vol. 38, No. 4, Jul. 2002, pp. 1731 1736.
Kwon et al., “Fabrication of Metallic Nanodots in Large-Area Arrays by Mold-to-Mold Cross Imprinting,” Nano Letters, vol. 5, No. 12, pp. 2557-2562 (2005).

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