Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1983-08-26
1986-03-04
Roy, Upendra
Metal working
Method of mechanical manufacture
Assembling or joining
148 15, 148175, 148187, 148DIG10, 357 34, 357 91, H01L 21265, H01L 21203, H01L 2702
Patent
active
045732566
ABSTRACT:
A process for making high performance NPN bipolar transistors functioning in a current switch logic circuit. A bipolar transistor is formed within an isolated region of a monocrystalline silicon body. The transistor includes an N+ subcollector, and N+ collector reach-through which connects the subcollector to a major surface of the silicon body, a P base region above the subcollector and adjacent to the reach-through an N+ emitter region within the base region and extending from the major surface. The base region includes an intrinsic base region located below the emitter region and an extrinsic region extending from the major surface and adjacent to the emitter region. The extrinsic base completely surrounds the emitter region. A mask is formed above the major surface having openings only above major portions of the extrinsic base regions. A P+ region is formed in the extrinsic base region by ion implanting with a P type dopant to a depth less than the depth of the N emitter region followed by a short thermal anneal to activate the P dopant. Electrical ohmic contacts are made and the elements are connected in a current switch logic circuit. The use of high conductivity P+ region in the extrinsic base region closely adjacent to the emitter reduces the extrinsic base resistance. Independent doping in the extrinsic base through the mask openings allows independent control of the intrinsic and extrinsic base resistances. These changes increase the performance of bipolar transistor integrated circuits for current switch logic applications.
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Dumke IBM-TDB, 26 (1983) 492.
Lechaton John S.
Pitner Philip M.
Srinivasan Gurumakonda R.
Coca T. Rao
International Business Machines - Corporation
Meyers Steven J.
Roy Upendra
Saile George O.
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