Method for making a fluid pressure transducer

Metal working – Electric condenser making

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264 61, 264 66, 3612834, 361284, H01G 516

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057405948

ABSTRACT:
A capacitive fluid pressure transducer is shown formed of a monolithic ceramic body (10) having a cavity located between a diaphragm portion (12) and a base portion (14). Opposed capacitor plates (22, 24) are disposed on opposed surfaces of the diaphragm portion and the base portion. The capacitor plates (22, 24) are formed of palladium oxide/silver having a ratio selected to create a fluid pressure level in the cavity as a result of oxygen evolution incident to the reduction of palladium oxide during the sintering cycle to offset the tendency of the diaphragm to bow inwardly due to shrinkage mismatch of the metal and ceramic materials.

REFERENCES:
patent: 4716492 (1987-12-01), Charboneau et al.
patent: 5525280 (1996-06-01), Shukla et al.
patent: 5544399 (1996-08-01), Bishop et al.
Silver-Palladium Thick-Film Conductors Sea Fue Wang, Joseph P. Dougherty, Wayne Huebner, John G. Pepin Journal of the American Ceramic Society; vol. 77, No. 12 -pp. 3051-3072, Dec. 1994.

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