Method for making a dynamic pressure sensor and a pressure senso

Details Method for making a dynamic pressure sensor and a pressure senso Method for making a dynamic pressure sensor and a pressure senso

1993-10-07

1994-07-05

Woodiel, Donald

Measuring and testing

Fluid pressure gauge

Mounting and connection

29454, 73147, 73715, 92103M, G01L 708, G01M 900

Patent

active

053257200

ABSTRACT:
A method for providing a perfectly flat top with a sharp edge on a dynamic pressure sensor using a cup-shaped stretched membrane as a sensing element. First, metal is deposited on the membrane and surrounding areas. Next, the side wall of the pressure sensor with the deposited metal is machined to a predetermined size. Finally, deposited metal is removed from the top of the membrane in small steps, by machining or lapping while the pressure sensor is mounted in a jig or the wall of a test object, until the true top surface of the membrane appears. A thin indicator layer having a color contrasting with the color of the membrane may be applied to the top of the membrane before metal is deposited to facilitate the determination of when to stop metal removal from the top surface of the membrane.

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patent: 4770032 (1988-09-01), Plentovich et al.
patent: 5007286 (1991-04-01), Malcolm et al.
patent: 5249468 (1993-10-01), Benedikt et al.

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