Method for making a diaphragm unit of a condenser microphone

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S025420, C029S609100, C029S876000, C029S877000, C216S062000, C216S066000, C216S067000, C156S308200, C156S309600, C156S309900, C156S320000, C367S178000, C367S180000, C381S174000, C381S191000, C438S003000, C438S042000, C438S057000, C438S098000

Reexamination Certificate

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07469461

ABSTRACT:
A method for making a diaphragm unit of a condenser microphone includes the steps of: forming a liftoff layer on a substrate; forming an insulator diaphragm film on the liftoff layer; and removing the liftoff layer from the diaphragm film and the substrate so as to separate the diaphragm film from the substrate.

REFERENCES:
patent: 5490220 (1996-02-01), Loeppert
patent: 5759870 (1998-06-01), Yun et al.

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