Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1993-04-07
1995-02-14
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
4272551, 4272557, 427577, 427113, 427122, C23C 1626, C23C 1650, B05D 512
Patent
active
053894006
ABSTRACT:
A method for producing a diamond/carbon/carbon composite is provided which includes the steps of densifying a preform of interwoven vapor grown carbon fibers form a carbon/carbon composite, and then depositing a polycrystalline diamond film on the carbon/carbon composite. The preform may be densified by depositing pyrolyric carbon into the interstices of the preform, either by a chemical vapor infiltration process or by a pitch infiltration process. The polycrystalline diamond film is deposited on the carbon/carbon composite by a microwave plasma enhanced chemical vapor deposition process. The resulting diamond/carbon/carbon composite can be utilized as an integral dielectric heat sink by depositing metallic circuits on the diamond layer of the diamond/carbon/carbon composite.
REFERENCES:
patent: 3949062 (1976-04-01), Vereschagin et al.
patent: 4122636 (1978-10-01), Roy et al.
patent: 4396663 (1983-08-01), Mitchell et al.
patent: 4437962 (1984-03-01), Banks
patent: 4490201 (1984-12-01), Leeds
patent: 4504519 (1985-03-01), Zelez
patent: 4830702 (1989-05-01), Singh et al.
patent: 4859493 (1989-08-01), Lemelson
patent: 4938940 (1990-07-01), Hirose et al.
patent: 4940015 (1990-07-01), Kobashi et al.
patent: 4944904 (1990-07-01), Singh et al.
patent: 4958590 (1990-09-01), Goforth
patent: 4961958 (1990-10-01), Desphandey et al.
patent: 5008737 (1991-04-01), Burnham et al.
patent: 5126206 (1992-06-01), Garg et al.
patent: 5203924 (1993-04-01), Mitani et al.
patent: 5204167 (1993-04-01), Saijo et al.
R. Messier "The Quest for Diamond Coatings," J. of Metals, Sep. 1987 pp. 8-11.
W. Zhu, et al, "Graphite Formation in CVD Diamond Film Deposition," 35th Nat. Symposium of Am. Vacuum Soc., Atlanta, Ga., Oct. 1988--pp. 1-22.
R. Messier et al, "From Diamond-Like Carbon to Diamond Coating," presented at ICMC, San Diego 1987. Pp. 1-11.
A. R. Badzian et al, "Crystallization of Diamond Crystals and Films by Microwave Assisted CVD (Part II)", Mat. Res. Bull., vol. 23, pp. 531-548, 1988.
A. Bazdian et al, "Vapor Deposition Synthesis of Diamond Films" SPIE vol. 683 Infrared and Optical Transmitting Materials, Aug. 1986,--pp. 127-138.
B. V. Deryagin et al, "Epitaxial Synthesis of Diamond in the Metastable Region," Russian Chemical Reviews, 39(9), 1970. Pp. 783-788.
R. C. DeVries, "Synthesis of Diamond under Metastable Conditions," Ann. Rev. Mater. Sci, 1987 17:161-187.
Geis et al, "Diamond Film Semiconductors," Sci. American Oct. 1992 pp. 84-89.
Chang et al, "Diamond Crystal Growth by Plasma Chemical Vapor Deposition," J. Appl. Phys. 63 (5), Mar. 1988 pp. 1744-1748.
A. R. Badzian et al, "Diamond Thin Films Prepared by Plasma Chemical Vapor Deposition Processes," Materials Research Society Meeting, Jun. 1987, vol. 15 pp. 63-77 Les Addition de Physique, Paris.
Lake Max L.
Ting Jyh-Ming
Applied Sciences, Inc.
Beck Shrive
Chen Bret
LandOfFree
Method for making a diamond/carbon/carbon composite useful as an does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for making a diamond/carbon/carbon composite useful as an, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for making a diamond/carbon/carbon composite useful as an will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-286168