Glass manufacturing – Means shaping preform from granular material with fusion means
Reexamination Certificate
2011-06-07
2011-06-07
Lorengo, Jerry (Department: 1731)
Glass manufacturing
Means shaping preform from granular material with fusion means
C423S325000, C423S335000, C501S054000, C501S133000, C106S482000, C106S485000
Reexamination Certificate
active
07954341
ABSTRACT:
The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical components for microlithography. According to the invention the material consists of synthetically produced quartz crystallites which form a polycrystalline structure and have a mean grain size in the range between 500 nm and 30 μm. The method according to the invention for making a blank from the material comprises providing granules consisting of synthetically produced quartz crystals having a mean grain size in the range between 500 nm and 30 μm, and sintering the granules to obtain a blank of polycrystalline quartz.
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Espacenet English language translation of DE 3611449 published Oct. 15, 1987.
Kuehn Bodo
Ochs Stefan
Heraeus Quarzglas GmbH & Co. KG
Lorengo Jerry
Tiajolott and Kelly LLP
Wiese Noah S
LandOfFree
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