Method for machining workpieces of brittle hard material into wa

Details Method for machining workpieces of brittle hard material into wa Method for machining workpieces of brittle hard material into wa

1986-05-22

1987-05-12

Olszewski, Robert P.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51125, 51134, 51209R, B24B 722

Patent

active

046638903

ABSTRACT:
A method for machining a disk-shaped workpiece, for example having a thickness of between 350 and 1200 microns, formed of brittle crystalline material having a Vickers hardness greater than about 7,000 N/mm.sup.2 in the manufacture of a wafer having a fine thickness, such as in the range of between about 60 and 250 microns, comprises a "cross" grinding operation including the steps of situating the workpiece in opposed relationship to a flat grinding surface of a rotating cup-type grinding wheel and infeeding or plunging the grinding wheel with respect to the workpiece in a direction substantially parallel to the axis of rotation of the grinding wheel at a controlled rate while maintaining the workpiece fixed and stationary with respect to the axis of rotation of the grinding wheel until a layer of the workpiece having a specifically predetermined optimal thickness has been abraded. The method of the invention provides increased yields of wafers with improved surface quality and precision and with decreased depth of damage of the crystal lattice structure.

REFERENCES:
patent: 653531 (1900-07-01), Richmond et al.
patent: 2315475 (1943-03-01), Cobb et al.
patent: 3142942 (1964-08-01), Celovsky
patent: 3665648 (1972-05-01), Yamanaka
patent: 3841028 (1974-10-01), Katzke
patent: 4064660 (1977-12-01), Lampert

Affiliated with

Also associated with

Rating

Method for machining workpieces of brittle hard material into wa does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for machining workpieces of brittle hard material into wa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for machining workpieces of brittle hard material into wa will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1792911