Method for low pressure testing of a solid state pressure sensor

Details Method for low pressure testing of a solid state pressure sensor Method for low pressure testing of a solid state pressure sensor

1987-10-13

1988-10-18

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

29 2535, 296211, 324158F, H01C 1700, H01L 4122

Patent

active

047777168

ABSTRACT:
A miniature vacuum chamber that is capable of testing individual dice prior to packaging is described. The upper portion of the chamber consists of a housing having testing probes and a vacuum inlet disposed therein. The lower portion of the chamber consists of a chuck that holds a wafer and a lower vacuum chamber. The lower portion is indexed to place a dice in contact with the probes. The upper and lower portions then form a seal and a vacuum is drawn in the area defined by the upper and lower chambers. The dice is then tested; the area pressurized; and the chuck indexed to test the next dice.

REFERENCES:
patent: 3766616 (1973-10-01), Standte
patent: 3913195 (1975-10-01), Beaver
patent: 3979671 (1976-09-01), Meeker et al.
patent: 4281449 (1981-08-01), Ports et al.
patent: 4567432 (1986-01-01), Buol et al.

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