Method for localized deposition of noble metal catalysts with co

Details Method for localized deposition of noble metal catalysts with co Method for localized deposition of noble metal catalysts with co

1996-12-17

1998-10-13

Beck, Shrive

Coating processes

Electrical product produced

Metal coating

4272481, 427250, 427252, 427249, 4272553, 4271263, 502527, C23C 1618, C23C 1640

Patent

active

058209220

ABSTRACT:
A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.

REFERENCES:
patent: 4096823 (1978-06-01), Schladitz

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