Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1998-01-21
1999-09-14
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
4272492, 42724915, 42724917, C23C 1632
Patent
active
059520469
ABSTRACT:
A method of forming a carbide material on a substrate, comprising vaporizing a carbide source reagent to form a carbide source reagent vapor, and contacting the carbide source reagent vapor with the substrate to deposit the carbide material on the substrate, wherein the carbide source reagent comprises a compound of the formula: ##STR1## wherein: R.sub.1, R.sub.2, R.sub.3 and R.sub.4 may each vary independently of the others and are selected from the group consisting of hydrogen and C.sub.1 -C.sub.8 alkyl;
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Advanced Technology & Materials Inc.
Hultquist Steven J.
King Roy V.
Zitzmann Oliver A. M.
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