Method for limiting emission current in field emission devices

Details Method for limiting emission current in field emission devices Method for limiting emission current in field emission devices

1996-11-14

2000-10-10

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Electron emitter manufacture

438527, H01L 21266

Patent

active

06130106&

ABSTRACT:
A field emission display has electron emitters that are current-limited by implanting in a silicon layer only enough ions to produce a desired current, and then forming emitters from the silicon layer by isotropic etching.

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patent: 5229331 (1993-07-01), Doan et al.
patent: 5354694 (1994-10-01), Field et al.
patent: 5420054 (1995-05-01), Choi et al.
patent: 5532177 (1996-07-01), Cathey
patent: 5818153 (1998-10-01), Allen

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