Fishing – trapping – and vermin destroying
Patent
1987-05-11
1988-11-15
Saba, William G.
Fishing, trapping, and vermin destroying
148DIG71, 20415715, 427 531, 427 541, 427 55, 427 561, 437 88, 437108, 437160, 437173, 437929, 437942, 437963, H01L 21205, H01L 21225
Patent
active
047849630
ABSTRACT:
Semiconductor components which have a plurality of layers lying on top of one another are manufactured with the assistance of a method for light-induced, photolytic deposition. Particularly, periodically alternating layers (hyperfine structure elements) and/or doping patterns are produced simultaneously with deposition of layers and/or with randomly selected doping gradients. In particular, the method is also suited for simultaneous deposition of layers lying laterally side-by-side or of laterally side-by-side differing dopings of a layer being deposited. In the context of doping, the radiation damage known from implantation is avoided.
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Krimmel Eberhard F.
Lutsch Adolf G. K.
Saba William G.
Siemens Aktiengesellschaft
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