Method for laser scanning flip-chip integrated circuits

Details Method for laser scanning flip-chip integrated circuits Method for laser scanning flip-chip integrated circuits

1998-11-04

2000-11-14

Gutierrez, Diego

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

374120, 374 4, G01K 1100, G01N 2572

Patent

active

061460141

ABSTRACT:
Methods for analyzing temperature characteristics of an integrated circuit. In one embodiment, a beam of laser light is directed at the back side of an integrated circuit. The intensity level of laser light reflected from the integrated circuit is measured and compared to a reference intensity level. The magnitude of the difference between the reference intensity level and the intensity level of the reflected laser light is indicative of a temperature characteristic of the integrated circuit.

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