Method for laser micromachining

Details Method for laser micromachining Method for laser micromachining

2008-05-13

2008-05-13

Evans, Geoffrey S. (Department: 1793)

Electric heating

Metal heating

By arc

C219S121680, C219S121830

Reexamination Certificate

active

07371993

ABSTRACT:
A method of laser micro-machining a work piece, with a laser, including the steps of: locating the workpiece on a carrier forming a part of a transport system, the carrier can be displaced along a path parallel to an X-axis of the workpiece, a Y-axis lying transverse the path, and a Z-axis lying transverse the path; focusing an image generated by an output beam from the laser at a working datum position defined relative to the path which path is established by the transport system to traverse the first datum position; a plane defined by the X- and Y-axis lying substantially perpendicular to the output beam; and displacing the workpiece along the path by way of the transport system so as to enable the work-piece to be subject to micro-machining by way of the laser.

REFERENCES:
patent: 3519334 (1970-07-01), Heitmann et al.
patent: 4550241 (1985-10-01), Scott et al.
patent: 4710908 (1987-12-01), Ohshima et al.
patent: 4854156 (1989-08-01), Hoeffel et al.
patent: 5690785 (1997-11-01), Nakaya
patent: 5811754 (1998-09-01), Nakatani et al.
patent: 6318153 (2001-11-01), Dumberger et al.
patent: 6333572 (2001-12-01), Ono
patent: 6452131 (2002-09-01), Britnell
patent: 6467922 (2002-10-01), Blanc et al.
patent: 6483091 (2002-11-01), Sadler et al.
patent: 6590182 (2003-07-01), Domae
patent: 6621060 (2003-09-01), Nantel et al.
patent: 6622544 (2003-09-01), Akerblom
patent: 2002/0125231 (2002-09-01), Hunter et al.
patent: 2003/0022421 (2003-01-01), Shimoto et al.
patent: 2003/0169524 (2003-09-01), Adin et al.
patent: 42 34 788 (1994-04-01), None
patent: 5-23880 (1993-02-01), None
Abbott C et al: “New Techniques for Laser Micromachining MEMS Devices” 2002, Proceedings of the SPIE, SPIE, Bellingham, VA, US pp. 281-288 xp001193877 issn: 0277-786x (To Follow).

Affiliated with

Also associated with

Rating

Method for laser micromachining does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for laser micromachining, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for laser micromachining will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2767165