Method for laminating electro-mechanical structures

Metal working – Piezoelectric device making

Reexamination Certificate

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C029S025410, C029S025420, C029S622000, C029S600000, C156S250000, C310S309000, C200S181000, C335S078000

Reexamination Certificate

active

10664404

ABSTRACT:
Methods and systems of assembling and making laminated electro-mechanical systems and structures are described. A plurality of structural layers are formed that include at least one structural layer having a movable element formed therein. The plurality of structural layers are stacked and aligned into a stack. Each structural layer in the stack is attached to an adjacent structural layer of the stack.

REFERENCES:
patent: 4065677 (1977-12-01), Micheron et al.
patent: 4461968 (1984-07-01), Kolm et al.
patent: 4496211 (1985-01-01), Daniel
patent: 4570139 (1986-02-01), Kroll
patent: 4755706 (1988-07-01), Harnden, Jr. et al.
patent: 4979159 (1990-12-01), Tsuruoka et al.
patent: 5016978 (1991-05-01), Fargette et al.
patent: 5048912 (1991-09-01), Kunikane et al.
patent: 5072228 (1991-12-01), Kuwahara
patent: 5398011 (1995-03-01), Kimura et al.
patent: 5430421 (1995-07-01), Bornand et al.
patent: 5454904 (1995-10-01), Ghezzo et al.
patent: 5472539 (1995-12-01), Saia et al.
patent: 5475353 (1995-12-01), Roshen et al.
patent: 5557132 (1996-09-01), Takahashi
patent: 5629918 (1997-05-01), Ho et al.
patent: 5696619 (1997-12-01), Knipe et al.
patent: 5784190 (1998-07-01), Worley
patent: 5818316 (1998-10-01), Shen et al.
patent: 5838847 (1998-11-01), Pan et al.
patent: 5847631 (1998-12-01), Taylor et al.
patent: 5898515 (1999-04-01), Furlani et al.
patent: 5945898 (1999-08-01), Judy et al.
patent: 5982554 (1999-11-01), Goldstein et al.
patent: 6016092 (2000-01-01), Qiu et al.
patent: 6016095 (2000-01-01), Herbert
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6046659 (2000-04-01), Loo et al.
patent: 6078016 (2000-06-01), Yoshikawa et al.
patent: 6084281 (2000-07-01), Fullin et al.
patent: 6094116 (2000-07-01), Tai et al.
patent: 6094293 (2000-07-01), Yokoyama et al.
patent: 6115231 (2000-09-01), Shirakawa
patent: 6124650 (2000-09-01), Bishop et al.
patent: 6143997 (2000-11-01), Feng et al.
patent: 6160230 (2000-12-01), McMillan et al.
patent: 6191671 (2001-02-01), Schlaak et al.
patent: 6297072 (2001-10-01), Tilmans et al.
patent: 6384353 (2002-05-01), Huang et al.
patent: 6410360 (2002-06-01), Steenberge
patent: 6495895 (2002-12-01), Peterson et al.
patent: 6511894 (2003-01-01), Song
patent: 6621390 (2003-09-01), Song et al.
patent: 6633212 (2003-10-01), Ruan et al.
patent: 6794965 (2004-09-01), Shen et al.
patent: 7102480 (2006-09-01), Bergstedt et al.
patent: 2002/0196110 (2002-12-01), Vaitkus et al.
patent: 2005/0057329 (2005-03-01), Shen et al.
patent: 198 20 821 (1999-12-01), None
patent: 100 31 569 (2001-02-01), None
patent: 0 452 012 (1991-10-01), None
patent: 0 452 012 (1991-10-01), None
patent: 0 685 864 (1995-12-01), None
patent: 0 709 911 (1996-05-01), None
patent: 0 780 858 (1997-06-01), None
patent: 0 869 519 (1998-10-01), None
patent: 0 887 879 (1998-12-01), None
patent: 2 572 546 (1986-05-01), None
patent: 54-161952 (1979-12-01), None
patent: 4-275519 (1992-10-01), None
patent: 6-251684 (1994-09-01), None
patent: WO 97/39468 (1997-10-01), None
patent: WO 98/34269 (1998-08-01), None
patent: WO 99/27548 (1999-06-01), None
patent: WO 01/57899 (2001-08-01), None
patent: WO 01/84211 (2001-11-01), None
International Search Report for International Application No. PCT/US03/29254 mailed on Mar. 5, 2004.
Richard P. Feymann, “There's Plenty of Room at the Bottom”, Dec. 29, 1959, pp. 1-12, Internet Source: http://222.zyvex.com
anotech/feynman.html.
E. Fullin, J. Gobet, H.A.C. Tilmans, and J. Bergvist, “A New Basic Technology for Magnetic Micro-Acuators”, pp. 143-147.
Jack W. Judy and Richard S. Muller “Magnetically Actuated, Addressable Microstructures”, Sep. 1997, Journal of Microelectromechanical Systems, vol. 6, No. 3, Sep. 1997, pp. 249-255.
Ezekiel JJ Kruglick and Kristofer SJ Pister, “Project Overview: Micro-Relays”, Tech. Digital Solid-State Sensor and Actuator Workshop, 1998, Hilton Head 98 and 19th International Conference on Electric Contact Phenomena, Nuremberg, Germany, Sep. 1998 (Downloaded from Internet Source: http://www-bsac.eecs.berkeley.edu/Kruglick/relays/relays.html, on Jul. 12, 1999) 2 pgs.
Ezekiel J.J. Kruglick and Kristofer S.J. Pister, “Bistable MEMS Relays and Contact Characterization”, Tech. Digital Solid-State Sensor and Actuator Workshop, Hilton Head, 1988 and 19th International Conference on Electric Contact Phenomena, Nuremberg, Germany, Sep. 1998, 5 pgs.
Laure K. Lagorce and Oliver Brand, “Magnetic Microactuators Based on Polymer Magnets”, Mar. 1999, IEEE Journal of Microelectromechanical Systems, IEEE, vol. 8., No. 1., Mar. 1999, 8 pages.
“P10D Electricity & Magnetism Lecture 14”, Internet Source: http://scitec.uwhichill.edu.bb/cmp/online/P10D/Lecture14/lect14.htn, Jan. 3, 2000, pp. 1-5.
“Ultraminiature Magnetic Latching to 5-relays SPDT DC to C Band”, Series RF 341, product information from Teledyne Relays, 1998.
M. Ruan et al., “Latching Microelectromagnetic Relays” , Sensors and Actuators A 91 (Jul. 15, 2001), Copyright 2001 Elsevier Science B.V., pp. 346-350.
Xi-Qing Sun, K.R. Farmer, W.N. Carr, “A Bistable Microrelay Based on Two-Segment Multimorph Cantilever Actuators”, 11th Annual Workshop on Micro Electrical Mechanical Systems, Heidelberg, Germany, IEEE, Jan. 25-29, 1998, pp. 154-159.
William P. Taylor and Mark G. Allen, “Integrated Magnetic Microrelays: Normally Open, Normally Closed, and Multi-Pole Devices”, 1997 International Conference on Solid-State Sensors and Actuators, IEEE, Jun. 16-19, 1997, pp. 1149-1152.
William P. Taylor, Oliver Brand, Mark G. Allen. “Fully Integrated Magnetically Actuated Micromachined Relays”, Journal of Microelectromechanical Systems, IEEE, vol. 7, No. 2, Jun. 1998, pp. 181-191.
Tilmans, et al., “A Fully-Packaged Electromagnetic Microrelay”, Proc. MEMS '99, Orlando, FL, Jan. 17-21, 1999, copyright IEEE 1999, pp. 25-30.
William Trimmer, “The Scaling of Micromechanical Devices”, Internet Source: http://home.earthlink.net/-trimmerw/mems/scale.html on Jan. 3, 2000 (adapted from article Microrobots and Micromechanical Systems by W.S.N. Trimmer, Sensors and Actuators, vol. 19, No. 3, Sep. 1989, pp. 267-287, and other sources).
John A. Wright and Yu-Chong Tai, “Micro-Miniature Electromagnetic Switches Fabricated Using MEMS Technology”, Proceedings: 46th Annual International Relay Conference: NARM '98, Apr. 1998, pp. 13-1 to 13-4.
John A. Wright, Yu-Chong Tai and Gerald Lilienthal, “A Magnetostatic MEMS Switch for DC Brushless Motor Commutation”, Proceedings Solid State Sensor and Actuator Workshop, Hilton Head, Jun. 1998, pp. 304-307.
John A. Wright, Yu-Chong Tai, and Shih-Chia Chang, “A Large-Force, Fully-Integrated MEMS Magnetic Actuator”, Tranducers '97, 1997 International Conference on Solid State Sensors and Actuators, Chicago, Jun. 16-19, 1997.
Ann, Chong H. & Allen, Mark G., A Fully Integrated Micromagnetic Actuator With A Multilevel Meander Magnetic Core, 1992 IEEE, Solid-State Sensor and Actuator Workshop, Technical Digest, Hilton Head Island, South Carolina, Jun. 22-25, 1992, Technical Digest, pp. 14-17.
English-Language Abstract of DE 10031569, published Feb. 1, 2001, 1 page.
English-Language Abstract of DE 19820821, published Dec. 16, 1999, 1 page.
English-Language Abstract of EP 0780858, published Jun. 25, 1997, 1 page.
English-Language Abstract of EP 0869519, published Oct. 7, 1998, 1 page.
English-Language Abstract of FR 2572546, published May 2, 1986, 1 page.
English-Language Abstract of JP 4275519, published Oct. 1, 1992, 1 page.
English-Language Abstract of JP 6251684, published Sep. 9, 1994, 1 page.
English-Language Abstract of JP 54161952, published Dec. 22, 1979, 1 page.
English-Language Abstract of WO 9927548, published Jun. 3, 1999, 1 page.

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