Method for ion-aided coating on electrically insulating substrat

Details Method for ion-aided coating on electrically insulating substrat Method for ion-aided coating on electrically insulating substrat

1981-11-03

1983-12-06

Hoffman, James R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 39, 427 40, 427 41, B05D 100

Patent

active

044193807

ABSTRACT:
The present invention is directed to coating low-conductive or non-conductive materials in a vacuum, such as coating electrically-insulating substrates, by operating a plasma source comprising a thermionic cathode and anode with the anode-voltage continuously alternating between an ignition voltage U.sub.Z and an extinction voltage U.sub.L at a frequency of between several kHz and several hundred kHz, the thermionic cathode continuously emitting electrons.

REFERENCES:
patent: 4349582 (1982-09-01), Beerwald et al.

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