Method for interferometrically measuring an optical property...

Details Method for interferometrically measuring an optical property... Method for interferometrically measuring an optical property...

2006-07-20

2010-06-29

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07746478

ABSTRACT:
The invention relates to a method for interferometrically measuring large optics. A combination of a method known as stitching technique, during which the sub-interferograms are determined on partial surfaces of measuring area and are joined in a software-controlled manner and which, as a result, enables the use of small, more cost-effective interferometers, however polished surfaces of the test piece being assumed, together with an immersion method, during which, in fact, lower demands for the surface quality of the test piece exist that, however, is accompanied by edge faults. In order to make this combination possible, a modification of the stitching technique is developed, during which the measuring area (CA) is completely covered by a film consisting of an immersion liquid. A device a suited for carrying out this method is characterized by contact bodies, which are made of transparent material, rest upon the main surfaces of the test piece, and which completely cover the measuring area (CA), a film consisting of an immersion liquid being formed between the contact bodies and the main surfaces of the test piece.

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