Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate
2006-08-08
2006-08-08
Gurley, Lynne A. (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
C438S006000, C438S007000, C438S016000, C438S031000
Reexamination Certificate
active
07087444
ABSTRACT:
A method of forming an integrated microelectronic device and a micro channel is provided. The method offers an inexpensive way of integrating devices that are usually incompatible during fabrication, a microchannel and a microelectronic structure such as an electro-optic light source, a detector or a MEMs device into a single integrated structure.
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Chabinyc Michael L.
Kneissl Michael A.
Ready Steven E.
Teepe Mark R.
Wong William S.
Chen Kent
Gurley Lynne A.
Isaac Stanetta
Palo Alto Research Center Incorporated
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