Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Having diverse electrical device
Patent
1995-09-06
1998-08-25
Trinh, Michael
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Having diverse electrical device
438 50, 438 52, 438200, 438691, H01L 2100
Patent
active
057982830
ABSTRACT:
A method for integrating one or more microelectromechanical (MEM) devices with electronic circuitry. The method comprises the steps of forming each MEM device within a cavity below a device surface of the substrate; encapsulating the MEM device prior to forming electronic circuitry on the substrate; and releasing the MEM device for operation after fabrication of the electronic circuitry. Planarization of the encapsulated MEM device prior to formation of the electronic circuitry allows the use of standard processing steps for fabrication of the electronic circuitry.
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McWhorter Paul J.
Montague Stephen
Smith James H.
Sniegowski Jeffry J.
Hohimer John P.
Sandia Corporation
Trinh Michael
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