Metal working – Method of mechanical manufacture – Assembling or joining
Reexamination Certificate
2006-05-09
2006-05-09
Bryant, David P. (Department: 3726)
Metal working
Method of mechanical manufacture
Assembling or joining
Reexamination Certificate
active
07039999
ABSTRACT:
This process for the installation of semiconductor fabrication tools includes designing standard modules for connecting the sources of the process gases and liquids t so that, for each gas and liquid, the sources of each required gas and liquid only need to be connected to the standard module once instead of multiple connections to the fabrication tool and support equipment. The modules can be installed before the delivery of the tool so that connection to the site sources of gases and liquids can be accomplished with fewer connections and in much shorter time.
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Chabot Gerald A.
Tarr Adam L.
Bryant David P.
O'Donnell, Esq. John W.
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