Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1996-07-30
1997-08-05
Nguyen, Vinh P.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 731, 324765, G01R 3128
Patent
active
056546327
ABSTRACT:
A method is disclosed, which sequentially inspects a plurality of semiconductor devices formed on a semiconductor wafer. This method executes a full inspection analysis on the individual devices on the wafer. The full inspection is carried out based on predetermined inspection criteria to determine whether or not the inspected devices are defective or properly functional. The number of devices determined as good ones during the full inspection analysis is sequentially counted, whereas the counted number is reset to zero whenever any device is determined to be defective during the full inspection routine. A simplified inspection analysis is executed on a predetermined number of devices when the counted number reaches a predetermined value. The simplified inspection is carried out against some of all the predetermined inspection criteria to determine whether or not the inspected devices are defects.
REFERENCES:
patent: 4875002 (1989-10-01), Sakamoto et al.
patent: 4985676 (1991-01-01), Karasawa
patent: 5286656 (1994-02-01), Keown et al.
Fujitsu Limited
Fujitsu VLSI Limited
Nguyen Vinh P.
LandOfFree
Method for inspecting semiconductor devices on a wafer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for inspecting semiconductor devices on a wafer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for inspecting semiconductor devices on a wafer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1077360